JPH01106453U - - Google Patents
Info
- Publication number
- JPH01106453U JPH01106453U JP51388U JP51388U JPH01106453U JP H01106453 U JPH01106453 U JP H01106453U JP 51388 U JP51388 U JP 51388U JP 51388 U JP51388 U JP 51388U JP H01106453 U JPH01106453 U JP H01106453U
- Authority
- JP
- Japan
- Prior art keywords
- comb
- shaped electrode
- conveying path
- wafer transfer
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP51388U JPH01106453U (en]) | 1988-01-06 | 1988-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP51388U JPH01106453U (en]) | 1988-01-06 | 1988-01-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01106453U true JPH01106453U (en]) | 1989-07-18 |
Family
ID=31199607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51388U Pending JPH01106453U (en]) | 1988-01-06 | 1988-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01106453U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07231685A (ja) * | 1994-02-21 | 1995-08-29 | Kanagawa Kagaku Gijutsu Akad | 弾性表面波リニアモータ |
| WO2009031290A1 (ja) * | 2007-09-03 | 2009-03-12 | National University Corporation Shizuoka University | 弾性波デバイス |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6082548A (ja) * | 1983-10-07 | 1985-05-10 | Canon Inc | シ−ト搬送装置 |
-
1988
- 1988-01-06 JP JP51388U patent/JPH01106453U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6082548A (ja) * | 1983-10-07 | 1985-05-10 | Canon Inc | シ−ト搬送装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07231685A (ja) * | 1994-02-21 | 1995-08-29 | Kanagawa Kagaku Gijutsu Akad | 弾性表面波リニアモータ |
| WO2009031290A1 (ja) * | 2007-09-03 | 2009-03-12 | National University Corporation Shizuoka University | 弾性波デバイス |